mass flow sensor3810S SERIES
Description
■Applicable gas：N₂,Air,H₂,He,Ar,O₂,CO₂ etc. ■Flow range：10SCCM～50SLM ■Accuracy：±3～5%F.S.
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■Applicable gas：N₂,Air,H₂,He,Ar,O₂,CO₂ etc. ■Flow range：10SCCM～50SLM ■Accuracy：±3～5%F.S.
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